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Applied Performance Service

Applied Performance Service (APS) is the most comprehensive service solution available. The APS product provides 7x24 service coverage; including system performance commitments such as tool uptime or availability with predictable cost. Optimized tool productivity, committed supplier-dependent uptime and availability of consumable and non-consumable parts, with onsite rapid downs support reduces your system Cost of Ownership (CoO).

APS includes preventive and corrective maintenance, genuine consumable and non-consumable parts, Applied managed inventory, with kitting and cleaning of parts.


  • Reduce MTTR with OEM trained hardware and process experts and increased parts availability
  • Tool uptime or availability performance commitment increases tool productivity
  • Target bottleneck tools to increase fab productivity
  • Increase production stability through controlled uptime targets
  • Reduce internal operational costs with a streamlined supply chain
  • Maintain tool stability with OEM trained software expertise


  • Corrective and preventative maintenance support using certified Applied Materials labor
  • 24x7 On-site coverage with guaranteed response time
  • Single supply chain for volume discounted consumable and non-consumable parts
  • Priority for non-consumables parts coverage on failure
  • System software support for bug repair
  • Adaptive pricing option to provide flexibility with changes in tool utilization