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Applied SmartFactory® Fault Detection and Classification

Fault Detection
Equipment health monitoring and diagnostics
Fault Detection

Fault detection and classification (FDC) transforms sensor data into summary statistics and models that can be analyzed against user defined limits to identify process excursions. For process and equipment engineers, maximizing equipment effectiveness, reducing yield excursions, improving product cycle time and enhancing the overall output of the factory are key success metrics. SmartFactory FDC is built on Applied’s equipment control technology, the E3 platform, which promotes information sharing.

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Minimize Yield Loss Due To Excursions

SmartFactory FDC detects equipment issues immediately by continuously monitoring sensors and events against performance metrics, resulting in improved tool availability and reduced scrap. In one case, a customer improved tool utilization by 6 hours per week. In another case, FDC results were used to isolate a tool fault that resulted in avoided PM downtime.

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Receive Proactive And Rapid Feedback On Equipment Health

SmartFactory FDC continuously monitors equipment parameters against preconfigured limits using statistical analysis techniques to provide proactive and rapid feedback on equipment health. It eliminates unscheduled downtime, improves tool availability and reduces scrap. FDC is proven to detect equipment issues faster than similar systems and is the only solution built on a single platform that works with multiple EES and APC systems. Applied Material’s FDC software is used by leading memory and logic 300mm semiconductor factories, as well as LCD display manufacturers.

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Get Closer To Your Data

SmartFactory FDC provides a deeper understanding of equipment data. It performs the data analysis portion of the solution by taking collected data and completing the analysis so you can act upon the data. SmartFactory FDC makes your engineering team more effective by allowing engineers to analyze sensor data from manufacturing equipment, detect out‐of‐ norm conditions and trace them back to the tool issues. Its flexible model management capabilities make building and managing models fast and easy, reducing development effort by multiple man months.

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