Maydan Technology Center


State-of-the-Art Laboratory for Semiconductor Technology Development and Customer Collaboration

Chip fabrication is perhaps the most complex manufacturing environment in existence. It takes several hundred steps to make a chip, and each different chip type will have its own unique sequence. For chip manufacturers, understanding and characterizing the interactions between different steps is critical to rapidly achieving high production yields.

The MTC, located at Applied Materials’ Sunnyvale campus in California, is designed to allow a faster transition to new technologies, shorten cycle time to production and reduce risk for customers. The center contains a complete suite of the 300mm wafer fabrication equipment needed to examine and optimize the chip fabrication process.

In addition to Applied tools, the center also houses third party lithography and metrology systems to allow complete process sequences to be run. This unique capability enables Applied Materials’ customers to test integrated process sequences using their actual device wafers before installation of the process equipment at the customer's site.

Facts and Figures

39,000ft3 class 1 (ISO class 3) cleanroom

  • Fewer than 35 particles (>0.1μm) per cubic foot, compared to over 8 million in a typical urban environment
  • Similar in size to an advanced pilot manufacturing line

Contains over 120 tools

  • Including Dielectric deposition, etch, photomask fabrication, metallization, metrology and inspection, planarization, rapid thermal processing, diffusion, wet processing

Complete lithography cell

  • Includes an immersion-capable 193nm ASML scanner

Automated wafer handling system

  • Overhead monorail system delivers wafers to tool
  • 70,000 wafer capacity storage facility

Tools networked to factory automation software

  • Equipment performance tracking
  • Scheduling and dispatching
  • Advanced process diagnostics

On-site 2 megawatt solar electricity plant

High-efficiency byproduct treatment systems

Named after Dr. Dan Maydan, who spearheaded the development of many of the technologies that enabled Applied to become the world’s leading semiconductor equipment manufacturer

Related Content

Maydan Technology Factsheet

   English (214kB)